A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM

Title: A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
Creator: Fowler, A. G.; Laskovski, A. N.; Hammond, A. C.; Moheimani, S. O. R.
Relation: Journal of Microelectromechanical Systems Vol. 21, Issue 4, p. 771-773
Publisher Link: http://dx.doi.org/10.1109/JMEMS.2012.2191940
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2012
Description: A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 μm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.
Subject: atomic force microscopy; electrostatic actuators; microelectrochemical systems; MEMS; nanopositioning
Identifier: http://hdl.handle.net/1959.13/1316666
Identifier: uon:23241
Identifier: ISSN:1057-7157
Language: eng
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